General Features

- PC-based instrument with Windows XP Professional OS

- Supports current-voltage (IV) unit, capacitance-voltage (CV) measurement unit and pulse generation unit with one box.

- Supports current-voltage (IV) and both quasi-static and medium-frequency capacitance-voltage (CV) measurement

- Offline data analysis and application test development via Desktop EasyEXPERT software

- Ten module slots for source monitor units (SMUs) and other module types

The Agilent B1500A Semiconductor Device Analyzer is a modular instrument with a ten-slot configuration that supports both IV and CV measurements and also fast high-voltage pulsing. Its familiar, MS Windows ® user interface supports Agilent’s EasyEXPERT software, which provides a new, more intuitive task-oriented approach to device characterization. Because of its extremely low-current, low-voltage, and integrated capacitance measurement capabilities, the Agilent B1500A can be used for a wide range of semiconductor device characterization needs (IC-CAP supports the B1500A). It is also an excellent solution for non-volatile memory cell characterization and high-speed device characterization (including advanced NBTI measurement).

Online demo video of EasyEXPERT : EasyEXPERT Basic Concept Software Demo

Online demo videos of HV-SPGU: HV-SPGU NVM Testing Demos

The latest version of EasyEXPERT : EasyEXPERT Software Update

Desktop EasyEXPERT software: Desktop EasyEXPERT

Features and Benefits

- Superior IV measurement performance: 0.1 fA / 0.5 µV measurement resolution

- Measurement features include single and multi-channel sweep, time sampling, list sweep, quasi-static CV (using the SMUs), direct control and arbitrary linear waveform generation (ALWG) GUI for the HV-SPGUs.

- Optional, integrated capacitance module supports CV measurements up to 5 MHz

- Optional positioner-based CV-IV switching solutions available with 0.5 µV voltage measurement resolution and 10 fA, 1 fA or 0.1 fA current measurement resolution capability

- Easy test automation with built-in semiautomatic wafer prober drivers and test sequencing without programming via the Quick Test mode

- Optional high-voltage semiconductor pulse generator unit (HV-SPGU) available with 10 ns programmable pulse widths and +/- 40 V (80 V peak-to-peak) output.

- Optional waveform generator/fast measurement unit (WGFMU) available with ALWG and fast current or voltage measurement capabilities.

- 10 ns pulsed IV solution is available for characterizing high-k gate dielectric and SOI (silicon-on-insulator) transistors.

- A Classic Test mode is available to provide the look, feel, and terminology of the 4155/4156 interface while enhancing user interaction by taking full advantage of Microsoft Windows GUI features.